high-na-euv

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JiSeok1579 / high-na-euv-sim

Research-grade simulator for 0.55 NA High-NA EUV lithography. Models the path from 13.5 nm source through anamorphic optics to wafer aerial image, with Mask 3D effects, photoresist, and SMO/PMWO optimization.

python simulation lithography fourier-optics photoresist computational-lithography high-na-euv

Updated Jul 26, 2026
Python

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