Neural-ILT, An End-to-end Learning-based Mask Optimizer
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Updated
Jan 2, 2023 - Python
Neural-ILT, An End-to-end Learning-based Mask Optimizer
Learning-based lithography simulator and mask optimizer
GPU-accelerated cloud platform for OPC / inverse lithography (ILT) with native curvilinear mask support — GDS/OASIS in, corrected masks out.
Per-pixel binary discrete flow matching with trajectory-attached fine-tuning for inverse lithography (OPC)
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