cd-sem

WorkBuddy 专家包：半导体量测检测设备专家（量检测 / Process Control）— OCD、CD-SEM、套刻、膜厚、电子束检测、晶圆缺陷检测、产业链与国产替代、KLA/中科飞测/精测电子

Design-based SEM CD/EPE metrology on simulated LithoBench images: learned U-Net/DCNv3 contour models cut CD 3-sigma precision from 0.88 to 0.43 nm at 64 frames vs tuned edge tracing (test set, single seed). Registration, gauges, TMU-style, LER/LCDU, Carinthia-S real SEM defects, C++/CUDA edge kernel (62x vs 48-thread CPU).