Example script using tidy3d to simulate energy-resolved diffraction by a metagrating in the extreme ultraviolet. The metagrating is made of a silicon membrane with vacuum holes. The silicon material is fitted to experimental data using the FastDispersionFitter plugin. The diffraction efficiency of the different orders is plotted as a function of wavelength.
See our paper preprint at https://arxiv.org/abs/2607.06174 .
Transmissive extreme ultraviolet metagrating
Anna Kulter*, Tiago Regio Crispim, Lorenz Weiss, Alexander Sagar Grossek, David J. Grafinger, Zsuzsanna Pápa, Judit Budai, Lázár Tóth3, Péter Dombi, Rodolfo Previdi, Harald Plank, Andreas Hohenau, Martin Schultze, Marcus Ossiander*